(КПІ ім. Ігоря Сікорського, 2026) Feoklistov, D.; Bohdan, H.
The paper analyzes modern approaches to measuring the temperature of MEMS sensors, their advantages and disadvantages. The limitations of traditional methods with external sensors, caused by thermal delays and gradients, are shown. Methods of temperature self-indication based on the internal parameters of the sensor (resonant frequency, amplitude, automatic gain control (AGC) signals) are considered. The prospects of using the difference frequencies of multimode resonators and AGC signals are substantiated. A combined approach is proposed that increases sensitivity, reduces the influence of noise and hysteresis, and increases reliability due to channel redundancy. Key difficulties are identified: calibration, synchronization, and harmonic suppression.