Zelinskyi, D.Horokhov, V.Kondratenko, O.Shmyrova, L.Semikina, T.2023-03-302023-03-302020Peculiarities of Usage Diamond-Like Carbon Films as Antireflection Coating / D. Zelinskyi, V. Horokhov, O. Kondratenko, L. Shmyrova, T. Semikina // Електронна та Акустична Інженерія : науково-технічний журнал. – 2020. – Т. 3, № 3. – С. 16-20. – Бібліогр.: 10 назв.https://ela.kpi.ua/handle/123456789/54129The series of three diamond-like carbon films was fabricated using Plasma – Enhanced Chemical Vapor Deposition setup designed for deposition of amorphous silicon films. The deposited films were analyzed by Spectroscopic ellipsometer Semilab SE-2000 in terms of optical properties. All the measurements were analyzed and modeled by the Fresnel equations. Three parameters were identified: refractive index, extinction index, and thickness. The range of these values indicates that the films can be used as antireflection coatings. The obtained values for n, k, and d are located in ranges: for n - 1.484 and 1621, for k - 0.345 and 0.062, and for d- 136.20 and 74.66.enDLC filmPECVD methodspectroscopic ellipsometryantireflection coatingsrefractive indexплівка DLCМетод PECVDспектроскопічна еліпсометріяантивідбивні покриттяпоказник заломленняArticleС. 16-20https://doi.org/10.20535/2617-0965.2020.3.3.199800524.5720000-0002-8617-65620000-0002-5609-69160000-0003-1948-44310000-0001-5497-41400000-0002-6182-4703