Electrical properties of highly nitrogen-doped 6H-SiC single crystals: Microwave cavity perturbation study
dc.contributor.author | Savchenko, D. V. | |
dc.contributor.author | Yatsyk, D. M. | |
dc.contributor.author | Genkin, O. M. | |
dc.contributor.author | Nosachov, Yu. F. | |
dc.contributor.author | Drozdenko, O. V. | |
dc.contributor.author | Moiseenko, V. I. | |
dc.contributor.author | Kalabukhova, E. N. | |
dc.date.accessioned | 2023-04-06T09:20:55Z | |
dc.date.available | 2023-04-06T09:20:55Z | |
dc.date.issued | 2023 | |
dc.format.pagerange | P. 030-035 | uk |
dc.identifier.citation | Electrical properties of highly nitrogen-doped 6H-SiC single crystals: Microwave cavity perturbation study / D. Savchenko et al. Semiconductor Physics Quantum Electronics & Optoelectronics. 2023. Vol. 26, no. 1. P. 030–035. | uk |
dc.identifier.doi | https://doi.org/10.15407/spqeo26.01.030 | |
dc.identifier.uri | https://ela.kpi.ua/handle/123456789/54329 | |
dc.language.iso | en | uk |
dc.publisher | V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine | uk |
dc.publisher.place | Київ | uk |
dc.relation.ispartof | Semiconductor Physics, Quantum Electronics & Optoelectronics, Vol. 26(1) | uk |
dc.subject | conductivity | uk |
dc.subject | SiC | uk |
dc.subject | cavity perturbation method | uk |
dc.subject | activation energy | uk |
dc.title | Electrical properties of highly nitrogen-doped 6H-SiC single crystals: Microwave cavity perturbation study | uk |
dc.type | Article | uk |
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