Кафедра автоматизації електромеханічних систем та електроприводу (АЕМСЕП)

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https://ela.kpi.ua/handle/123456789/167

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Перегляд Кафедра автоматизації електромеханічних систем та електроприводу (АЕМСЕП) за Автор "Isyp, Mykhailo Oleksandrovych"

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    Automatic control system of the direct photolithography writer with an autofocus algorithm
    (Igor Sikorsky Kyiv Polytechnic Institute, 2023) Isyp, Mykhailo Oleksandrovych; Peresada, Sergiy
    The thesis contains 95 pages, of them 75 – the main text, 45 figures, and 8 tables. The main purpose of the project is to develop an automatic focus control system for the direct lithography writing tool. Motivation lies in making such instrumentation more available for research laboratories. In the beginning, an analytical review of the current state microlithography technologies is made. Consequently, direct lithography writing is selected as the most effective method for microfabrication in the research area. Then, the main requirements for lithographic processes of direct writer systems are described, and the tool’s design is proposed. The direct lithography writer system is developed based on an open-source microscopy project, namely the OpenFlexure Microscope. The design's mechanical, optical, electrical, and computation subsystems are described, and modifications required for the lithography are applied. In addition, the device's mechanical properties are determined by calculations and measurements. The autofocus control problem is formulated following the proposed direct lithography writer design. The system with the 28BYJ-48 stepper motor is investigated by simulating the focus control model in MatLab/Simulink. For better performance, the RSF-8B-30 servomotor is proposed as an alternative, succeeding in accuracy and speed increasing for the focus control.