Automatic control system of the direct photolithography writer with an autofocus algorithm
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Дата
2023
Науковий керівник
Назва журналу
Номер ISSN
Назва тому
Видавець
Igor Sikorsky Kyiv Polytechnic Institute
Анотація
The thesis contains 95 pages, of them 75 – the main text, 45 figures, and 8 tables.
The main purpose of the project is to develop an automatic focus control system
for the direct lithography writing tool. Motivation lies in making such instrumentation
more available for research laboratories.
In the beginning, an analytical review of the current state microlithography
technologies is made. Consequently, direct lithography writing is selected as the most
effective method for microfabrication in the research area. Then, the main requirements
for lithographic processes of direct writer systems are described, and the tool’s design
is proposed.
The direct lithography writer system is developed based on an open-source
microscopy project, namely the OpenFlexure Microscope. The design's mechanical,
optical, electrical, and computation subsystems are described, and modifications
required for the lithography are applied. In addition, the device's mechanical properties
are determined by calculations and measurements.
The autofocus control problem is formulated following the proposed direct
lithography writer design. The system with the 28BYJ-48 stepper motor is investigated
by simulating the focus control model in MatLab/Simulink. For better performance,
the RSF-8B-30 servomotor is proposed as an alternative, succeeding in accuracy and
speed increasing for the focus control.
Опис
Ключові слова
direct lithography writer, autofocus control, permenant magnet syncronous motor, positional control, unipolar stepper motor, пристрій прямої літографії, автофокусування, синхронний двигун з постійними магнітами, позиційне керування, уніполярний кроковий двигун
Бібліографічний опис
Isyp, M. O. Automatic control system of the direct photolithography writer with an autofocus algorithm : master’s degree : 141 Electric power engineering, electronics and electromechanics / Isyp Mykhailo Oleksandrovych. – Kyiv, 2023. – 95 p.